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EBL System

Etcher

Deposition

Photolithography

CVD

Other facilities

 

Machine reservation

Charging scheme

 

Contact

Other facilities:

 

- Wet stations

- Tencor Alpha Step 500

- Optical Microscope

- Spin coater, hot plate

- Rapid Thermal Annealing systems

- Tube Furance 

- SemiTool R&D system