Home EBL System Etcher Deposition Photolithography CVD Other facilities
Etcher
Deposition
Photolithography
CVD
Other facilities
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Chemical Vapor Deposition system:
Semco LB45 LPCVD System
- Thermal oxidation
- Poly Si and Silicon Nitride deposition
Oxford Plasma Lab 80+ PECVD System
- Silicon oxide, silicon nitride, silicon oxynitride deposition